Self-sensing tweezer devices and associated methods for micro and nano-scale manipulation and assembly

ABSTRACT

The present invention provides a self-sensing tweezer device for micro and nano-scale manipulation, assembly, and surface modification, including: one or more elongated beams disposed in a first configuration; one or more oscillators coupled to the one or more elongated beams, wherein the one or more oscillators are operable for selectively oscillating the one or more elongated beams to form one or more “virtual” probe tips; and an actuator coupled to the one or more elongated beams, wherein the actuator is operable for selectively actuating the one or more elongated beams from the first configuration to a second configuration.

CROSS-REFERENCE TO RELATED APPLICATION(S)

The present non-provisional patent application claims the benefit ofpriority of U.S. Provisional Patent Application No. 60/813,962, filed onJun. 15, 2006, and entitled “Self Sensing Tweezers for Micro-Assemblyand Manipulation,” the contents of which are incorporated in full byreference herein. The present non-provisional patent application alsoclaims the benefit of priority of U.S. Provisional Patent ApplicationNo. (unassigned), filed on May 25, 2007, and entitled “Standing WaveProbes for Measurement, Manipulation and Modification Across DimensionalScales,” the contents of which are also incorporated in full byreference herein. The present non-provisional patent application isfurther a continuation-in-part of co-pending U.S. patent applicationSer. No. 10/989,744, filed on Nov. 16, 2004, and entitled “AnOscillating Probe With a Virtual Probe Tip,” which claims the benefit ofpriority of U.S. Provisional Patent Application No. 60/520,500, filed onNov. 17, 2003, and entitled “An Oscillating Probe With a Virtual ProbeTip,” the contents of which are further incorporated in full byreference herein.

FIELD OF THE INVENTION

The present invention relates generally to the application of anoscillating probe technology in one or more dimensions to micro andnano-scale manipulation and assembly. More specifically, the presentinvention relates to self-sensing tweezer devices and associated methodsfor micro and nano-scale manipulation and assembly.

BACKGROUND OF THE INVENTION

Micro and nano-scale manipulation and assembly techniques have becomemore important in many industries in recent years, as the fabrication ofsmaller systems has become more desirable. Some researchers haveaddressed this micro and nano-scale manipulation and assembly issue byinvestigating non-contact manipulation and assembly techniques, such asby levitating components (i.e. through the use of electromagnetic andoptical tweezers, for example). Currently, the major limitation orchallenge with respect to these electromagnetic and optical tweezers isthe size of the devices themselves. Electromagnetic and optical tweezersare often relatively large and, as a result, their applicability islimited to relatively large unobstructed areas, with limited ability tomanipulate or place objects in or relative to features such as narrowchannels and cavities.

For any manipulation and assembly technique, there is a need for forcedetection capability integral with the gripping mechanism. The objectiveis to enable force feedback in order to detect the presence ofcomponents and prevent damage to the fragile components. For example,micro-mirrors in the assembly of optical switches typically break whenthe gripping forces exceed a few micro-Newtons. As a result,micro-manipulator technologies require sensing capability in order toprovide force feedback, with maximum applied forces less than thisthreshold. For example, one device has been developed that has theability to sense force, but the micro-sensor is static and, therefore,still susceptible to attraction forces between the micro-manipulator andthe specimen or component. In general, self-sensing tweezers with theability to overcome attraction forces and incorporating force sensingwould lead to new manufacturing and assembly process capabilities and,therefore, lower production costs.

BRIEF SUMMARY OF THE INVENTION

In various exemplary embodiments, the present invention provides aninnovative micro-manipulation tool using an oscillating probe technologythat enables the simultaneous sensing and control of interaction forcesin order to ensure reliable manipulation and assembly operations. Asused herein, the terms “manipulation” and “assembly” are understood tocontemplate manipulation, assembly, and or surface modification. Themicro-manipulation tool of the present invention is based on anoscillating probe technology that is used for the measurement ofhigh-aspect ratio micro-scale features, for example. Because thisoscillating probe technology often operates with a steady sinusoidalexcitation resulting in a characteristically stationary deformation modeshape that varies in amplitude harmonically with each oscillationperiod, it is also referred to as a “standing wave probe” technology.For the purposes of the present invention, it is the ability to apply adynamically varying force t6 one or more probes that represents animportant attribute of the contemplated embodiments. The oscillatingprobe technology is adapted to use one or more standing wave probes andimplement them as a micro-manipulator. Key advantages of the oscillatingprobe technology include the ability for the micro-manipulator to haveself-sensing capability, enabling the detection of a specimen orcomponent, and the ability to overcome problems associated with thepresence of attraction forces between the tips of the tweezers and thespecimen or component, for example.

In addition to meeting the above-referenced needs, this technology canfunction as a measurement tool as well as a micro-manipulator and enablesurface modification. This stems from the force feedback capability,which also provides the capability for dimensional metrology during themanipulation or assembly process. In general, this force feedback isused to set desired force while holding and manipulating, for example,and also to sense the presence of the specimen or component. This lateraspect is important in determining if the specimen or component isreleased, for example.

In one exemplary embodiment, the present invention provides aself-sensing tweezer device for micro and nano-scale manipulation andassembly, including: one or more elongated beams disposed in a firstconfiguration; one or more oscillators coupled to the one or moreelongated beams, wherein the one or more oscillators are operable forselectively oscillating the one or more elongated beams; and an actuator(which can, optionally, be integral with the one or more oscillators)coupled to the one or more elongated beams, wherein the actuator isoperable for selectively actuating the one or more elongated beams fromthe first configuration to a second configuration. Preferably, the oneor more elongated beams consist of one or more micro or nano-scaleelongated beams. The one or more elongated beams each include a tipportion that, when oscillated, defines a “virtual” probe tip of theelongated beam. As used herein, the terms “oscillator,” “oscillating,”“oscillated,” and “oscillation” are understood to contemplate theapplication of a dynamically varying displacement, via oscillation,impulse, an arbitrary waveform, etc. Each of the one or more elongatedbeams is configured to engage a specimen or component via one or more ofan interaction (i.e. physical, meniscus, etc.) force and an attractionforce when not oscillated. Each of the one or more elongated beams isconfigured to engage a specimen or component via only an interactionforce when oscillated. Preferably, the self-sensing tweezer device alsoincludes a circuit operable for receiving force feedback from the one ormore elongated beams. Optionally, the self-sensing tweezer devicefurther includes one or more positioning mechanisms coupled to one ormore of the one or more elongated beams and a specimen or component,wherein the one or more positioning mechanisms are operable forselectively positioning the one or more elongated beams with respect tothe specimen or component.

In another exemplary embodiment, the present invention provides aself-sensing tweezer method for micro and nano-scale manipulation andassembly, including: providing one or more elongated beams disposed in afirst configuration; providing one or more oscillators coupled to theone or more elongated beams, wherein the one or more oscillators areoperable for selectively oscillating the one or more elongated beams;and providing an actuator (which can, optionally, be integral with theone or more oscillators) coupled to the one or more elongated beams,wherein the actuator is operable for selectively actuating the one ormore elongated beams from the first configuration to a secondconfiguration. Preferably, the one or more elongated beams consist ofone or more micro or nano-scale elongated beams. The one or moreelongated beams each include a tip portion that, when oscillated,defines a “virtual” probe tip of the elongated beam. Again, as usedherein, the terms “oscillator,” “oscillating,” “oscillated,” and“oscillation” are understood to contemplate the application of adynamically varying displacement, via oscillation, impulse, an arbitrarywaveform, etc. Each of the one or more elongated beams is configured toengage a specimen or component via one or more of an interaction (i.e.physical, meniscus, etc.) force and an attraction force when notoscillated. Each of the one or more elongated beams is configured toengage a specimen or component via only an interaction force whenoscillated. Preferably, the self-sensing tweezer method also includesproviding a circuit operable for receiving force feedback from the oneor more elongated beams. Optionally, the self-sensing tweezer methodfurther includes providing one or more positioning mechanisms coupled toone or more of the one or more elongated beams and a specimen orcomponent, wherein the one or more positioning mechanisms are operablefor selectively positioning the one or more elongated beams with respectto the specimen or component.

In a further exemplary embodiment, the present invention provides amethod for manipulating, assembling, and/or surface modifying a micro ornano-scale specimen or component, including: providing one or more microor nano-scale beams each having a tip portion coupled to both one ormore oscillators operable for selectively oscillating the one or morebeams (independently or in concert) and a discrete or integrally formedactuator operable for selectively actuating the one or more beams from afirst configuration to a second configuration; disposing the tipportions of the one or more beams about a specimen or component;interacting the tip portions of the one or more beams with a surface ofthe specimen or component via the actuation of the actuator; oscillatingthe one or more beams in order to overcome any attraction forces betweenthe tip portions of the one or more beams and the specimen or component;and removing the tip portions of the one or more oscillating beams frominteraction with the surface of the specimen or component via theactuation of the actuator. Optionally, the method also includestranslating the one or more beams relative to the specimen or componentbetween the interacting and oscillating steps.

Alternatively, the present invention provides a method for manipulating,assembling, and/or surface modifying a micro or nano-scale specimen orcomponent, including: providing one or more micro or nano-scale beamseach having a tip portion coupled to both one or more oscillatorsoperable for selectively oscillating the one or more beams and adiscrete or integrally formed actuator operable for selectivelyactuating the one or more beams from a first configuration to a secondconfiguration; oscillating the one or more beams in order to overcomeany attraction forces between the tip portions of the one or more beamsand a specimen or component; disposing the tip portions of the one ormore oscillating beams about the specimen or component; interacting thetip portions of the one or more oscillating beams with a surface of thespecimen or component such that a measured nominal interaction forcevalue is achieved via the actuation of the actuator; and removing thetip portions of the one or more oscillating beams from interaction withthe surface of the specimen or component via the actuation of theactuator. Optionally, the method also includes translating the pluralityof oscillating beams relative to the specimen or component between theinteracting and removing steps.

In a still further exemplary embodiment, the present invention providesa device for manipulating, assembling, and/or surface modifying a microor nano-scale specimen or component, including: one or more tweezertips; one or more actuators operable for dynamically moving the one ormore tweezer tips, thereby creating an interaction force between the oneor more tweezer tips and the specimen or component when the one or moretweezer tips and the specimen or component are brought into proximity;one or more sensors operable for measuring the interaction force betweenthe one or more tweezer tips and the specimen or component; and one ormore motion control actuators operable for selectively bringing the oneor more tweezer tips and the specimen or component into proximity.

It is to be understood that both the foregoing general description andthe following detailed description provide exemplary embodiments of thepresent invention, and an overview or framework for understanding thenature and character of the present invention as it is claimed. Theaccompanying drawings are included in order to provide a furtherunderstanding of the present invention, and are incorporated into andconstitute a part of this specification. The accompanying drawingsillustrate the various exemplary embodiments of the present inventionand, together with the detailed description, serve to explain theprinciples of operation thereof. The accompanying drawings are meant tobe illustrative, and not limiting.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention is illustrated and described herein with referenceto the various drawings, in which like reference numbers are used todenote like device components and/or method steps, as appropriate, andin which:

FIG. 1 is a planar view of one exemplary embodiment of the standing waveprobe of the present invention, the standing wave probe including arelatively high-aspect ratio beam with an oscillating tip at the freeend and an oscillator and actuator at the fixed end (or other location);

FIG. 2 is another planar view of the standing wave probe of FIG. 1, therelatively high-aspect ratio beam being inserted into a hole or bore andan oscillation applied thereto, thereby forming a standing wave;

FIG. 3 is a further planar view of the standing wave probe of FIGS. 1and 2, illustrating the oscillation at the tip of the free end of therelatively high-aspect ratio beam (i.e. at the “virtual” probe tip);

FIG. 4 is a schematic diagram illustrating, step-by-step, an On-Off modefor operating the self-sensing tweezers of the present invention, theself-sensing tweezers being used to grasp and manipulate a micro ornano-scale specimen;

FIG. 5 is a schematic diagram illustrating, step-by-step, an On-On modefor operating the self-sensing tweezers of the present invention, theself-sensing tweezers being used to grasp and manipulate a micro ornano-scale specimen;

FIG. 6 is a series of plots of the fiber probe signal as a function ofthe input frequency of the tuning fork for a given experiment;

FIG. 7 is a series of plots of the resonating probe output signal as afunction of the approach of the probe base towards a steel surface inair with different tuning fork excitation voltages of about 5 V, about 2V, and about 1 V, respectively, for a given series of experiments; and

FIG. 8 is a planar view of one exemplary embodiment of an apparatus' forimplementing the micro-manipulator methodologies of the presentinvention.

DETAILED DESCRIPTION OF THE INVENTION

In general, the self-sensing tweezer device of the present inventionemploys one or more (e.g. one, two, three, or more) standing wave fibersor the like in order to create a micro-manipulator tool. Preferably,this tool has long, slender grips, thereby enabling the high-aspectratio manipulation, assembly, and/or surface modification of micro andnano-scale specimens or components. The incorporation of force feedbackenables the micro-manipulator fingers to be self sensing, therebycapable of detecting when a specimen or component is present, or to whatextent it has been surface modified. Additionally, the variable energythat can be supplied to the interaction interface by the standing waveprobe technology provides a desirable means for overcoming interactionforces. Moreover, force sensing enables the self-sensing tweezer deviceto be used as a dimensional measurement tool. All of these areattributes of the standing wave probe technology. Although thedescription below primarily addresses micro-scale tweezers, for purposesof illustration, the standing wave probe technology is inherentlyscaleable for nano-scale applications and, as a result, can be appliedto both micro and nano-scale problems. The description below illustratesthe implementation of a standing wave using a tuning fork assembly and asingle carbon fiber probe and the extension of this configuration andconcept to one or more (e.g. one, two, three, or more) standing wavefibers for use as a micro-manipulator.

Referring to FIGS. 1-3, the standing wave probe 10 of the presentinvention includes a relatively high-aspect ratio (e.g. exceeding about500:1) beam 12 with an oscillating tip 14 at the free end. The freelength of the beam 12 in this exemplary embodiment is about 5 mm and theshaft diameter is about 7.5 μm. It should be noted that, as suchstanding wave probes are scaled downwards in size, these specificationsnecessarily vary greatly. For example, for nano-scale applications, anaspect ratio on the order of 50:1, or even 5:1, may be more appropriate.All such variations are contemplated by the present invention. The fixedend of the beam 12 is attached to one tine of a tuning fork crystaloscillator 16 or the like, which is oscillated at about 32 kHz, forexample. Again, it should be noted that, as such standing wave probesare scaled downwards in size, these specifications necessarily varygreatly. For example, for nano-scale applications, an oscillationfrequency on the order of 32 MHz may be more appropriate. All suchvariations are contemplated by the present invention. Preferably, theinput signal to the oscillator 16 is an AC frequency close to theresonant frequency of the oscillator 16 that creates a standing wave inthe attached fiber 12, a transient signal, or the like. Again, as usedherein, the terms “oscillator,” “oscillating,” “oscillated,” and“oscillation” are understood to contemplate the application of adynamically varying displacement, via oscillation, impulse, an arbitrarywaveform, etc. Optionally, the standing wave probe 10 also includes amotion control actuator 15 that is operable for translating,extending/retracting, rotating, and/or tilting the beam 12. This motioncontrol actuator 15 can be a discrete component, or it can be integrallyformed with the oscillator 16.

As illustrated in FIGS. 2 and 3, the single or multi-directionoscillation of the beam 12 causes a point on the free end to movefarther away from the beam 12. In other words, the free end of the beam12 moves the greatest distance laterally as compared to any otherlocation along the length of the beam 12, providing a method by whichthe oscillating tip 14 forms a “virtual” probe tip (e.g. that, in thisor other applications can be interacted with a side of a hole or bore 18in order to obtain measurements). In practice, the input signalparameters, amplitude, frequency, phase, etc. are adjustable, providinga programmable oscillation amplitude at the free end of the beam 12ranging from a few microns up to several tens of microns, for example.The oscillating, or otherwise dynamically displaced, tip 14 storesenough energy to overcome adhesive interactions and does not stick tothe surface(s) being interacted. These concepts are applicable to singleand multi-fiber micro and nano-manipulators.

The above-referenced method of operation primarily describes a singlefiber generating a standing wave. This method of operation is nowextended to standing wave tweezers, for example. In this case one, two,three, or more fibers are each attached to separateoscillators/actuators that produce simultaneous probe motions. It shouldbe noted that the dynamically varying displacement of each fiber can bethe same or different (and can vary with time), as can the translationand/or extension/retraction. As a result, a wide variety ofmanipulation, assembly, surface modification, force sensing, andmeasurement choreographies can be achieved, such as grasping,extension/retraction, translation, rotation, inclination/declination,sculpting, etc. of a specimen of component. For example, through theprecise control of input frequency, phase, and amplitude, a specimen orcomponent can be picked up and rotated within the probe. Consideringthis approach, two types of operating modes can be used, and include anOff-On mode and an On-On mode.

Referring to FIG. 4, in the Off-On mode 30, the exemplary tweezers 50are fashioned from three parallel fibers 12 equispaced by 120 degreesfrom each other. It will be readily apparent to those of ordinary skillin the art that other fiber counts and configurations can be utilized.For example, the fibers 12 can have any suitable cross-sectional shapes,and these cross-sectional shapes can vary along the lengths of thefibers 12, the fibers 12 need not be parallel, etc. In general, the“elongated beams” and “fibers” of the present invention can include anygenerally elongated structures (i.e. including masses selectivelydisposed (mass variations) along their lengths, consisting of similar ordissimilar materials along their lengths, etc.). Thus, any relativelyslender structure can be used to provide an oscillatory motion at thepoint of gripping. The oscillators 16 to which the fibers 12 areattached are coupled to an actuator 31, which enables the fibers 12 tocontract and expand from a coaxial center axis or point, in thisconfiguration. Sequence #1 32 shows the three fibers 12 turned off (i.e.not operating in the standing wave mode). Next, in sequence #2 34, thethree fibers 12 surround the spherical specimen 40 and displace towardsthe specimen 40 using the actuator 31. The specimen 40 is then picked upusing interaction or attraction forces and moved to a new location, forexample. Sequence #3 36 shows the three fibers 12 turned on (i.e.operating in the standing wave mode, for example, such that the specimen40 no longer “sticks” to the fibers 12), however, the actuator 31 isstill closed, such that the specimen 40 is not released. Finally,sequence #4 38 shows the released specimen 40, the three fibers 12displace outwards, while the standing wave vibration, for example,prevents the specimen 40 from “sticking” to the fiber surfaces. As aresult, the specimen 40 is controllably released from the tweezers 50.

Referring to FIG. 5, a second strategy is referred to as an On-On mode60. In this mode 60, the fibers 12 generate a continuous standing wave,for example, during the complete interaction with the specimen 40. Twofibers 12 are attached to the actuator 31 and the objective of theactuator 31 is to change the displacement, L, between the two fibers 12.In Sequence #1 62, the two fibers 12 are lowered on either side of thespecimen 40 and the actuator 31 is contracted such that length L isreduced. Considering that the tweezers 50 will provide self sensing, theactuator 31 is retracted until a nominal force value between thespecimen 40 and tips of the tweezers 50 is achieved (via a phase-lockedloop (PLL) circuit or the like). In this manner, the specimen 40 can bepicked up from the surface while the standing wave, for example, is keptin the “on” position in sequence #2 64. Finally, sequence #3 66 movesthe specimen 40 to a new location and the actuator 31 increases length Lsuch that the fibers 12 move away from the specimen 40. At this point,the specimen 40 will not “stick” to the tips of the tweezers 50 becausethe standing wave, for example, is still activated. Therefore, the tipsof the tweezers 50 continue to expand away from the specimen 40 until noforce is detected in the tweezers 50. The benefit of this approach isthat the tips of the tweezers 50 continuously generate a self-sensingforce and, as a result, force feedback is always detected. It is notedthat moving the specimen substrate while the specimen is gripped andreleased also results in relative motion of the specimen and isequivalent to the pick-and-place operation outlined above.

The oscillating probe methods of the present invention provide distinctadvantages over conventional micro-manipulator tools. Specifically, theoscillating probe methods overcome adhesive interactions between thespecimen and the tweezers, are readily scaleable for micro andnano-technology applications, provide relatively high aspect ratios andthe ability to maneuver a specimen into challenging features, provideprogrammable amplitude tips, utilize one or multi-dimensionaloscillation normal to a specimen's surface and provide better clampinginteraction, yield methods for force detection between the specimen andthe tips, and enable measurement capability between the specimen and thetips.

A relatively simple experiment was conducted to illustrate theabove-referenced standing wave methods. A carbon fiber with a freelength of about 5 mm and a diameter of about 7.5 μm was bonded to acrystal oscillator. A PLL circuit was used to drive the tuning fork nearresonance, which corresponds to about 32 kHz. The output of the tuningfork was transferred to the PLL circuit and the objective of the PLLcircuit was to keep the tuning fork locked to a constant phase orfrequency. Therefore, a change in amplitude (i.e. corresponding betweeninput and output signals from the tuning fork) corresponded to anapplied force interaction between the fiber tip and the specimen. Oncethe single fiber was assembled, two types of preliminary tests wereperformed to evaluate the standing wave methods employed as one arm ofthe self-sensing tweezers. This experiment briefly evaluated surfaceinteractions with a specimen, as well as acting as the self-sensingtweezers.

First, a micro-scale specimen was picked up using attraction forces andit was observed if the specimen would release by generating a standingwave in the 7.5 μm-diameter fiber. The fiber was first moved into closeproximity with the specimen while the fiber was not vibrating. In thesecond step, the fiber and the specimen were brought into interactionand the specimen stuck to the fiber because of attraction forces. Thisenabled the specimen to be picked up, indicated by the surface beingbelow a focal plane in visual observations. Next, the specimen, whilestill in interaction with the fiber, was moved away from the surface,which was evident by the further blurring of the background. Finally,the tuning fork was oscillated, thereby generating a standing wave inthe fiber and releasing the specimen. This simplified experiment clearlyillustrated that the specimen overcomes attraction forces and releasesfrom the fiber once the standing wave is generated in the fiber.

During one of these pick and release cycles, the fiber's signal wasmonitored to determine if the tuning fork's signal changed once thespecimen was released. The tuning fork's amplitude signal was measuredusing the PLL circuit and was compared with a signal characteristic ofthe tuning fork's output in the absence of the attached specimen.Referring to FIG. 6, the tuning fork's frequency increased towards thefirst mode of natural frequency, which corresponded to about 7 V alongthe x-axis. During the first cycle, there was a fluid drop on the fibertip. The increase in signal at about 3 V represented the point whereenough energy was inputted into the tuning fork and fiber such that thestanding wave was formed. The lower part of the curve corresponded towhen the fluid drop was attached to the fiber tip and the upper part ofthe curve corresponded to when the fluid drop was released from thefiber tip. Moreover, a large signal spike during the first cycleoccurred at about 8 V on the x-axis and was related to the moment whenthe droplet was finally released from the fiber tip. Additionally, thisevent was confirmed by simultaneously observing the fiber and specimenunder a stereo microscope. Once released, the tuning forks' outputsignal shifted upward to a different signal characteristic. Thisoccurred because the specimen was no longer coupled to the standing wavefiber and, therefore, the fiber oscillated in a “free” state.Furthermore, the input frequency to the tuning fork was cycled up anddown 10 times while the fiber was producing a standing wave in this“free” state. These 10 cycles repeated quite well and are shown in FIG.6. Thus, the tuning fork's output signal was influenced by a mechanicalcoupling between the fiber and specimen. As a result, the plot clearlydemonstrates a different characteristic when the specimen is attached ascompared to when the specimen is released. It was also apparent thatthere was a distinct signal characteristic at the point of release andthe “free” probe characteristic fully recovered, indicating thatinsignificant moisture had been retained after the release.

The three plots shown in FIG. 7 illustrate data obtained in thelaboratory for the approach of a resonating fiber to a rigidly-clampedsurface. The probe consisted of a thin glass fiber of approximately 3 mmlength and approximately 10 μm diameter attached to one of the tines ofa tuning fork resonator. The tuning fork was, in turn, attached to apiezoelectric translator, with the motion of the translator monitored bya capacitance gauge. During the experiments, the fiber was translatedtowards a steel surface, in air, until interaction was detected. It wasthen retracted until the probe was released from the surface. Typically,five or more cycles were monitored and, in general, the characteristicswere found to repeat. Additionally, this was repeated for threedifferent excitation voltages of about 5 V, about 2 V, and about 1 V,respectively, corresponding to the results shown in FIG. 7. The inputsignal controlled the oscillation amplitudes and, therefore, theenergies in the probe tip. As the input voltage was decreased, astanding wave was still produced, however, at some point there wasenough energy stored in the fiber to overcome the attraction forces.

For all cases, when the probe was hanging freely, the sensor outputcorresponded to the lower, horizontal portion of the plots. Uponinteraction, there was a relatively rapid increase in the probe signal,the amplitude of this increase being dependent upon the excitationvoltage applied to the tuning fork. The magnitude of the responses fromthe free state to fully interacted were about 1.8 V, about 0.9 V, andabout 0.4 V, respectively, demonstrating a non-linearity at higherexcitation voltages. Upon retracting the probe, there was a distincthysteresis, with a kink being apparent in the first two plots. In air,there was a liquid film on the surface that was at a differentelectrical potential than the probe. Hence, the dominant forces uponretraction were those of chemical cohesion, electrostatic attraction,and the meniscus forces. Retraction forces on either side of theunloading curve kink were typically- considered to be the cohesionforces followed by the necking and subsequent release from the meniscus.

At the higher excitation voltages, the tuning fork was retracted adistance of about 1-2 μm before the reverse bending of the probe shankin combination with the oscillation of the probe were sufficient toovercome the cohesion and meniscus forces. However, in the last plot,the excitation was lowered such that it was below a “threshold” and theprobe was permanently adhered to the surface. In fact, the tuning forkwas retracted a maximum distance of about 12 μm without releasing fromthe specimen surface. After retracting for a third cycle, an impulse wasapplied to the apparatus upon which the probe was released. Uponreturning into interaction, the probe was again found to becomeattached. This clearly demonstrated the use of an oscillating probe forreleasing interaction and the dependence of this on the amplitude ofoscillation with a release threshold.

Referring to FIG. 8, an apparatus 70 for implementing themicro-manipulator methodologies of the present invention includes, forexample, two oscillators 72 and two carbon fibers 74 coupled to the twooscillators 72. The oscillators 72 and carbon fibers 74 are hingedlycoupled to a motion control actuator 76, such as a piezoelectricactuator, a feed screw motor, a hydraulic/pneumatic piston, aselectively deformable material, or the like, operable for selectivelymoving the carbon fibers 74 together or apart via its deployment. Theoscillators 72, carbon fibers 74, and motion control actuator 76 are allcoupled to an X-Y stage 78, which, in turn, is coupled to a Z-stage 80.Thus, the carbon fibers 74 can be selectively positioned relative to thespecimen 40. In this manner, the assembly responds similarly toconventional tweezers, which grasp and un-grasp specimens. The specimen40 rests on top of a five-axis motion control system 80, for example.This enables easy positioning of the specimen 40 relative to thetweezers. Once the carbon fibers 74 are aligned with the specimen 40,the assembly 70 is used in either the Off-On mode or the On-On mode, forexample.

Although the present invention has been illustrated and described hereinwith reference to preferred embodiments and specific examples thereof,it will be readily apparent to those of ordinary skill in the art thatother embodiments and examples may perform similar functions and/orachieve like results. All such equivalent embodiments and examples arewithin the spirit and scope of the present invention, are contemplatedthereby, and are intended to be covered by the following claims.

1. A self-sensing tweezer device for micro and nano-scale manipulationand assembly, comprising: one or more elongated beams disposed in afirst configuration; one or more oscillators coupled to the one or moreelongated beams, wherein the one or more oscillators are operable forselectively oscillating the one or more elongated beams; and an actuatorcoupled to the one or more elongated beams, wherein the actuator isoperable for selectively actuating the one or more elongated beams fromthe first configuration to a second configuration.
 2. The self-sensingtweezer device of claim 1, wherein the one or more elongated beamscomprise one or more micro-scale elongated beams.
 3. The self-sensingtweezer device of claim 1, wherein the one or more elongated beamscomprise one or more nano-scale elongated beams.
 4. The self-sensingtweezer device of claim 1, wherein the one or more elongated beams eachcomprise a tip portion that, when oscillated, defines a “virtual” probetip of the elongated beam.
 5. The self-sensing tweezer device of claim1, wherein each of the one or more elongated beams is configured toengage a specimen or component via one or more of an interaction forceand an attraction force when not oscillated.
 6. The self-sensing tweezerdevice of claim 1, wherein each of the one or more elongated beams isconfigured to engage a specimen or component via only an interactionforce when oscillated.
 7. The self-sensing tweezer device of claim 1,further comprising a circuit operable for receiving force feedback fromthe one or more elongated beams.
 8. The self-sensing tweezer device ofclaim 1, further comprising one or more positioning mechanisms coupledto one or more of the one or more elongated beams and a specimen orcomponent, wherein the one or more positioning mechanisms are operablefor selectively positioning the one or more elongated beams with respectto the specimen or component.
 9. The self-sensing tweezer device ofclaim 1, wherein the one or more oscillators and the actuator areintegrally formed.
 10. A self-sensing tweezer method for micro andnano-scale manipulation and assembly, comprising: providing one or moreelongated beams disposed in a first configuration; providing one or moreoscillators coupled to the one or more elongated beams, wherein the oneor more oscillators are operable for selectively oscillating the one ormore elongated beams; and providing an actuator coupled to the one ormore elongated beams, wherein the actuator is operable for selectivelyactuating the one or more elongated beams from the first configurationto a second configuration.
 11. The self-sensing tweezer method of claim10, wherein the one or more elongated beams comprise one or moremicro-scale elongated beams.
 12. The self-sensing tweezer method ofclaim 10, wherein the one or more elongated beams comprise one or morenano-scale elongated beams.
 13. The self-sensing tweezer method of claim10, wherein the one or more elongated beams each comprise a tip portionthat, when oscillated, defines a “virtual” probe tip of the elongatedbeam.
 14. The self-sensing tweezer method of claim 10, wherein each ofthe one or more elongated beams is configured to engage a specimen orcomponent via one or more of an interaction force and an attractionforce when not oscillated.
 15. The self-sensing tweezer method of claim10, wherein each of the one or more elongated beams is configured toengage a specimen or component via only an interaction force whenoscillated.
 16. The self-sensing tweezer method of claim 10, furthercomprising providing a circuit operable for receiving force feedbackfrom the one or more elongated beams.
 17. The self-sensing tweezermethod of claim 10, further comprising providing one or more positioningmechanisms coupled to one or more of the one or more elongated beams anda specimen or component, wherein the one or more positioning mechanismsare operable for selectively positioning the one or more elongated beamswith respect to the specimen or component.
 18. The self-sensing tweezermethod of claim 10, wherein the one or more oscillators and the actuatorare integrally formed.
 19. A method for manipulating, assembling, and/orsurface modifying a micro or nano-scale specimen or component,comprising: providing one or more micro or nano-scale beams each havinga tip portion coupled to both one or more oscillators operable forselectively oscillating the one or more beams and a discrete orintegrally formed actuator operable for selectively actuating the one ormore beams from a first configuration to a second configuration;disposing the tip portions of the one or more beams about a specimen orcomponent; interacting the tip portions of the one or more beams with asurface of the specimen or component via the actuation of the actuator;oscillating the one or more beams in order to overcome any attractionforces between the tip portions of the one or more beams and thespecimen or component; and removing the tip portions of the one or moreoscillating beams from interaction with the surface of the specimen orcomponent via the actuation of the actuator.
 20. The method of claim 19,further comprising translating the one or more beams relative to thespecimen or component between the interacting and oscillating steps. 21.A method for manipulating, assembling, and/or surface modifying a microor nano-scale specimen or component, comprising: providing one or moremicro or nano-scale beams each having a tip portion coupled to both oneor more oscillators operable for selectively oscillating the one or morebeams and a discrete or integrally formed actuator operable forselectively actuating the one or more beams from a first configurationto a second configuration; oscillating the one or more beams in order toovercome any attraction forces between the tip portions of the one ormore beams and a specimen or component; disposing the tip portions ofthe one or more oscillating beams about the specimen or component;interacting the tip portions of the one or more oscillating beams with asurface of the specimen or component such that a measured nominalinteraction force value is achieved via the actuation of the actuator;and removing the tip portions of the one or more oscillating beams frominteraction with the surface of the specimen or component via theactuation of the actuator.
 22. The method of claim 21, furthercomprising translating the plurality of oscillating beams relative tothe specimen or component between the interacting and removing steps.23. A device for manipulating, assembling, and/or surface modifying amicro or nano-scale specimen or component, comprising: one or moretweezer tips; one or more actuators operable for dynamically moving theone or more tweezer tips, thereby creating an interaction force betweenthe one or more tweezer tips and the specimen or component when the oneor more tweezer tips and the specimen or component are brought intoproximity; one or more sensors operable for measuring the interactionforce between the one or more tweezer tips and the specimen orcomponent; and one or more motion control actuators operable forselectively bringing the one or more tweezer tips and the specimen orcomponent into proximity.